First batch of 10 Silicon sensor wafers for the Atlas pixel detector
Here is a list of the wafers, with foundry numbering (this number is physically written on the n-side, near to the major flat).
S1-01S - wafer n. 1 -- Single metal ---Tested -- Sent to Bonn 13th/12/97
S1-02S - wafer n. 2 -- Single metal ---Tested
S1-03S - wafer n. 3 -- Single metal ---Tested -- Diced, no bumps
S1-04S - wafer n. 4 -- Single metal ---Tested
S1-05S - wafer n. 5 -- Single metal ---Tested -- Sent to LBL 11th/2/98
S1-06S - wafer n. 6 -- Single metal ---Tested -- Sent to Bonn 13th/12/97
S1-09S - wafer n. 9 -- Single metal ---Tested
S1-07D - wafer n. 7 -- Double metal -- Rej. -- Sent to Dortmund 12/3/98
S1-08D - wafer n. 8 -- Double metal -- Tested -- Sent to Bonn 13th/12/97
S1-10D - wafer n. 10 -- Double metal -- Rej. -- Sent to Munich 12th/2/98
The standard labeling scheme is assumed in the plot legends. For a reference, please reach the Atlas
web page in Dortmund.
A wafer layout is visible in this JPEG figure
These wafers have no minor flat. According to the SEMI standard they look like {111} p-type material. According to the measurements made in Munich the wafers are of n-type, {100}-oriented material.
The logbook which is automatically produced
by the LabView program is also available.
RESULTS
The I-V characteristics are available as jpg pictures. The quality is limited by the available disk space on the server. We shall improve it.
Only pictures marked by asterisks are actually ready in Jpeg format.
- Wafer n. 1
- Wafer n. 2
- Wafer n. 3
- Wafer n. 3 after chop-off
- Wafer n. 4
- Wafer n. 5
- Wafer n. 6
- Wafer n. 9
- Wafer n. 7
- Wafer n. 8
- Wafer n. 10
Page mantained by
Saverio D'Auria
Last modified: Fri Mar 13 14:41:43 MET